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miniaturized 3-channel Michelson-laser-interferometer with negligible restriction to target reflectivity
displacement sensor with single picometer resolution
easy synchronization with events and external devices
versatile firmware modules including real-time calculations
- 1 pm resolution
- working range up to 1000 mm
- velocity up to 1 m/s
- 10 MHz data rate
- USB and Ethernet connection
- synchronization with external devices
- synchronization with positioners
- logical combination of up to 8 trigger sources
Real-Time Calculation Unit
- sum, difference, min/max
- multiplication, division
- look-up tables
- 9 x digital input/output
- 3 x analog-to-digital converter (ADC)
- 3 x digital-to-analog converter (DAC)
- 3 x AquadB and 3 x serial data channels
- various kinds of standard sensor heads available
- customization possible
- electronic free design, low heat dissipation
- suitable for mirror and retro-reflector targets
- true differential non-contact measurements possible
- convenient access to digital and analog inputs and outputs
- monitoring of temperature, humidity and pressure
- compensation of the virtual drift induced by fluctuation of the refractive index of air
- real-time position correction
Modular Control System
- compact motion controller
- suitable for high-resolution positioning applications
- direct link to PICOSCALE interferometer for closed-loop positioning
Graphical User Interface
- ease of operation
- flexible data visualization
- parallel configuration of firmware modules
SOME MORE FACTS
The PICOSCALE interferometer provides diﬀerential non-contact measurements between a target mirror and a reference mirror. This allows measuring displacements
relative to a certain fixed point of an experimental setup, as well as minimization of noise. Both arms are aligned in order to reduce environmental inﬂuences as much as possible.
Figure: Experimental setup for diﬀerential measurements. Both the probe and the reference beam are guided to individual mirrors.
The diﬀerential displacement of these two mirrors is measured with very high resolution.
The PICOSCALE allows for simultaneous angular measurements in two degrees of freedom, typically yaw and pitch of a target object. SmarAct provides a special sensor head assembly containing three sensor heads and retro-reﬂectors.
Furthermore, the PICOSCALE can be used as an encoder for closed-loop control of rotary axes. A direct interface between interferometer controller and the new SmarAct motion controller MCS2 is now available.
Figure: Three PICOSCALE sensor heads are measuring the angle of the target plate to which
three retro-reﬂectors are mounted.
Measurements On Various Surfaces
The PICOSCALE optical working principle is based on a Michelson interferometer. This is beneficial in comparison with other interferometer types, especially
if the target reﬂectivity is arbitrary. In a demonstrator setup we show that the PICOSCALE can measure displacements of targets with diﬀerent reﬂectivities
using the same sensor head in a single pass configuration.
Figure: A C01 sensor head is aligned to a sample holder where different targets (gold mirror, LEGO brick, ceramic plate, glass plate, polished aluminum, copper-beryllium) are mounted.
Easy Alignment Using SmarAlign
The SmarAlign window is a user-friendly feature that is included in a selection of PICOSCALE sensor heads (e.g. PS-SH-C01). With the help of the fully integrated, visible pilot laser beam the sensor head and probe mirror can be aligned to superimpose the reference and probe beam at the beam splitter and thus to quickly obtain high signal quality. When the sensor head and probe mirror are aligned coarsely, the PICOSCALE GUI can be used to further optimize the signal quality.
Check our homepage to get more information about the PICOSCALE